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publicationDate 2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017190720-A1
titleOfInvention Alkylamino-substituted carbosilane precursors
abstract Disclosed are Si-containing film forming compositions comprising alkylamino-substituted carbosilane precursors, methods of synthesizing the same, and their use for vapor deposition processes.
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