abstract |
An optical sensor, an optical examination device, and a method of detecting optical properties. The optical sensor includes an irradiation system including light irradiator to irradiate a test object with light, and a detection system to detect the light that is emitted from the irradiation system to the test object and has propagated through the test object. The light irradiator includes a multilayered structure having an active layer, and the multilayered structure includes a surface-emitting laser element and a photo-sensing element optically connected to the surface-emitting laser element. The optical examination device includes the optical sensor, and a controller to calculate optical properties of the test object based on a detection result of the optical sensor. The method includes performing optical simulation to obtain a detection light quantity distribution for an optical model and performing inverse problem estimation. |