http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017157700-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7fce41211269b1bf0256e54cc2c8e8d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2201-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0648 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0652 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0732 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-53 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-0622 |
| filingDate | 2015-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fdb07f683b22ba56fa85a9b55178203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e18d220b4b3de101677d05b0d685ca55 |
| publicationDate | 2017-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2017157700-A1 |
| titleOfInvention | Method and device for the laser-based working of two-dimensional, crystalline substrates, in particular semiconductor substrates |
| abstract | The present invention relates to a method for laser-based machining of a planar, crystalline substrate in order to separate the substrate into a plurality of parts, in which the laser beam of a laser is directed, for machining the substrate, onto the latter, in which, with an optical arrangement positioned in the beam path of the laser, a laser beam focal surface which is expanded, viewed both along the beam direction and viewed in precisely a first direction perpendicular to the beam direction, but is not expanded in a second direction which is both perpendicular to the first direction and to the beam direction, is formed from the laser beam radiated onto said arrangement on the beam output side of the optical arrangement, the substrate being positioned relative to the laser beam focal surface such that the laser beam focal surface in the interior of the substrate, along an expanded surface portion of the substrate material, produces an induced absorption by means of which crack formations in the substrate material induced along this expanded surface portion are effected. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022185096-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11322405-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11712754-B2 |
| priorityDate | 2014-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.