| abstract |
A semiconductor structure includes a device region and a test region. In the device region, first fin spacers cover sidewalls of a first fin structure and have a first height, and a first epitaxy structure is disposed in the first fin structure, which a portion of the first epitaxy structure is above the first fin spacers and having a first width. In the test region, second fin spacers cover sidewalls of the second fin structure and have a second height, and the second height is greater than the first height. A second epitaxy structure is disposed in the second fin structure, and a portion of the second epitaxy structure is above the second fin spacers and having a second width, which the second width is less than the first width. |