| abstract |
Described herein is a composite coating on a substrate including a first parylene layer deposited on a substrate surface of a substrate, a first metal oxide layer covering the first parylene layer, a first metal oxide, parylene hybrid layer formed between the first metal oxide layer and the first parylene layer. The composite coating further includes a second parylene layer covering the first metal oxide layer, with the first metal oxide layer interposed between the first and second parylene layers. |