| abstract |
A charged particle beam device ( 10 a ) includes a computer ( 21 ) which controls multiple charged particle beam irradiation optical systems, the needle ( 18 ), and a gas supply portion ( 17 ) to transfer a sample piece Q to a predetermined position of the sample piece holder P, based on at least images of a sample piece holder (P), a needle ( 18 ), and the sample piece (Q) previously acquired by multiple charged particle beams. |