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publicationDate 2017-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017117195-A1
titleOfInvention Nano deposition and ablation for the repair and fabrication of integrated circuits
abstract An apparatus for and methods of repairing and manufacturing integrated circuits using the apparatus. The apparatus, comprising: a vacuum chamber containing: a movable stage configured to hold a substrate; an inspection and analysis probe; a heat source; a gas injector; and a gas manifold connecting multiple gas sources to the gas injector.
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