| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e41651508566f0385833e1ba14a21ffd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-0668
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
| filingDate |
2016-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b343c6c4a3feadf849183dd890637794
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf36a2013e5ca17e589a906b520c993 |
| publicationDate |
2017-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017108464-A1 |
| titleOfInvention |
System and method for forming microwells |
| abstract |
A method of forming a sensor component includes forming a first layer over a sensor pad of a sensor of a sensor array. The first layer includes a first inorganic material. The method further includes forming a second layer over the first layer. The second layer includes a polymeric material. The method also includes forming a third layer over the second layer, the third layer comprising a second inorganic material; patterning the third layer; and etching the second layer to define a well over the sensor pad of the sensor array. |
| priorityDate |
2013-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |