| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5210351072806716d4f3ec21f96e1c0b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D311-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D311-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-58 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D311-84 |
| filingDate |
2016-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a47db25b1f8371ad579bea44a49cba7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b21edff932a4b9483869b4400ce98079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a955627c3e3c2f813cc74c7c652a9d30 |
| publicationDate |
2017-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017101389-A1 |
| titleOfInvention |
Leveling composition and method for electrodeposition of metals in microelectronics |
| abstract |
The present disclosure relates to a leveling composition for electrodepositing metals. The composition comprises a compound of formula (I): |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/IT-202000000391-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022064813-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107708315-A |
| priorityDate |
2013-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |