http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017073809-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ede47b877b6df9c8d0c494cd66f45ae8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f6f175f2c8eac40363953838045e7c40
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-228
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46
filingDate 2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0187f4057346e830630307283c60b878
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3eef32b88ac1560e0c579e6e99ac07da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d75b5473d23cb9b080a6e6c322179c8
publicationDate 2017-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017073809-A1
titleOfInvention Method for manufacturing metal chalcogenide thin film and thin film manufactured thereby
abstract The present invention relates to the manufacturing of a heteroelement thin film, and particularly to a method for manufacturing a metal chalcogenide thin film and the thin film manufactured thereby. The present invention, which relates to a method for manufacturing a metal chalcogenide thin film, may comprise the steps of: supplying a vaporized metal precursor; supplying a chalcogen-containing gas; and forming a thin film by reacting the metal precursor with the chalcogen-containing gas on a growth substrate at a first temperature condition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019207245-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10797301-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11309539-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021080419-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11502287-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019006450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11233107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113278948-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10797353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593931-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I644727-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019207201-A1
priorityDate 2014-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014002777-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015011848-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24825
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448029909
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415831572
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777675
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416645804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578685
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450184696
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524078
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525870
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24817
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID345198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159409
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22227441
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29011
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24602
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82936
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450878015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451282663
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578684
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14802
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517535
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454040570
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83515
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549630
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83602
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520436
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID533
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6857437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453849761
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9920747
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593443
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123111
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520496
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11139377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579200
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523934
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523855
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID37715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14792
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776252
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10290777
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25138
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548916
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415841568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524161
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID144719
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419567053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3032536
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457814461
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491805
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518997
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23619064
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24616
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83506
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID518772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545376
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139765
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520486
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66224
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524021
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID134654
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531148
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419594054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559557
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519717
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24631
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452734454
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545422
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524196
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID98885
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447740608
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5139834
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515187
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524206
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419595266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16211477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578676
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID518712
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6328143
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712602
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24385
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136151
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID49868020
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515681
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82894
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21765
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454278351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9859353
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457706972
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID102110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24290
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519716
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449736604
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452742787
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123106
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454702160
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454374327
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9812778
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6096999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415842417
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544637
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520473
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5284466
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24193
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83340

Total number of triples: 182.