| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-32 |
| filingDate |
2016-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8300c288da9ea792b035707abe438e13 |
| publicationDate |
2017-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017051084-A1 |
| titleOfInvention |
Filtering material, filtration filter, and filtration method |
| abstract |
A filtering material which is used to filter a liquid chemical for lithography, in which a base material having a group represented by the following Formula (a0-1) is used: n (*-Ya 01 n W (a0-1)n in which Ya 01 represents a divalent linking group; W represents a heteroatom-containing group, here, the group represented by W includes a nitrogen atom bonded to Ya 01 and two or more heteroatoms other than the nitrogen atom bonded to Ya 01 ; n represents a natural number; and * represents a valence bond with respect to the base material. |
| priorityDate |
2015-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |