http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017048957-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2015-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_766b8723e240dc76b1173c65c9fac735 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ddce14db6bb54821322247c3bf7cfad |
| publicationDate | 2017-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2017048957-A1 |
| titleOfInvention | Target Expansion Rate Control in an Extreme Ultraviolet Light Source |
| abstract | A method includes providing a target material that comprises a component that emits extreme ultraviolet (EUV) light when converted to plasma; directing a first beam of radiation toward the target material to deliver energy to the target material to modify a geometric distribution of the target material to form a modified target; directing a second beam of radiation toward the modified target, the second beam of radiation converting at least part of the modified target to plasma that emits EUV light; measuring one or more characteristics associated with one or more of the target material and the modified target relative to the first beam of radiation; and controlling an amount of radiant exposure delivered to the target material from the first beam of radiation based on the one or more measured characteristics to within a predetermined range of energies. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10314153-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10605588-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10794683-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111566563-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11483918-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9778022-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11758639-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10429173-B2 |
| priorityDate | 2015-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.