| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-04105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0159
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0188
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0278
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-97 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate |
2015-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed71375c62b723dab18a0b4d4f62c88c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3cb0df30a5f4fb361616468913aabe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc20d2de5f9a282dfc2e2ce948d22f44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_686017ea1398116b2d2acd34c12e66d6 |
| publicationDate |
2017-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017015548-A1 |
| titleOfInvention |
Open cavity package using chip-embedding technology |
| abstract |
A method for fabricating packaged semiconductor devices ( 100 ) with an open cavity ( 110 a ) in panel format; placing (process 201 ) on an adhesive carrier tape a panel-sized grid of metallic pieces having a flat pad ( 230 ) and symmetrically placed vertical pillars ( 231 ); attaching (process 202 ) semiconductor chips ( 101 ) with sensor systems face-down onto the tape; laminating (process 203 ) and thinning (process 204 ) low CTE insulating material ( 234 ) to fill gaps between chips and grid; turning over (process 205 ) assembly to remove tape; plasma-cleaning assembly front side, sputtering and patterning (process 206 ) uniform metal layer across assembly and optionally plating (process 209 ) metal layer to form rerouting traces and extended contact pads for assembly; laminating (process 212 ) insulating stiffener across panel; opening (process 213 ) cavities in stiffener to access the sensor system; and singulating (process 214 ) packaged devices by cutting metallic pieces. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10650957-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10727203-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11524892-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10056419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110047763-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017221836-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10797002-B2 |
| priorityDate |
2015-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |