| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 |
| filingDate |
2015-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_312ef68adad5a08fb74d2a8f89e240f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5d56ad276a9cc65fd856c6a233cbb77 |
| publicationDate |
2017-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017014861-A1 |
| titleOfInvention |
Deposition apparatus |
| abstract |
A deposition apparatus includes an effusion cell, a guide rail, and a cooling channel. The effusion cell extends in a first direction. The guide rail is below the effusion cell and extends in a second direction. The cooling channel is below an upper surface of the guide rail and extends in the second direction. |
| priorityDate |
2015-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |