| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_348f3f6baaed2c2820b20117179213f6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09G3-3433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00952 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09G3-34 |
| filingDate |
2015-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c96e858ee66f6c2413d554128764915b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33c9f033e52f6019d5ec2ba182809f47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d24feb9f43fb73959cedc17bbce9f2bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_956e320bb38f30385b0e069aa5c597ba |
| publicationDate |
2017-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017003499-A1 |
| titleOfInvention |
Silane modified fluid for mems stiction reduction |
| abstract |
This disclosure provides devices and methods of reducing stiction during a fluid-filling process. A device can include two substrates with movable MEMS components on at least one of the substrates. The device can include a fluid between the two substrates and surrounding or at least partially surrounding the movable MEMS components, where the fluid can serve as a lubricant for the movable MEMS components. The fluid can be a liquid solution doped with a surface energy modifier, where the surface energy modifier includes a nonpolar functional group R. In some implementations, the nonpolar functional group R can be selected from the group consisting of: alkyl, aryl and naphthenic. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11253963-B1 |
| priorityDate |
2015-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |