| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f1c752afe38afe179b7a8519899debc6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2005-123 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0853
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-02 |
| filingDate |
2014-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ade315f336c339cf423fa6d7bee42d4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bb0f9a82a2777d3e301649d9dedc210
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dad05b5da028e925e10a4d02550d0eb |
| publicationDate |
2017-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2017003172-A1 |
| titleOfInvention |
Infrared thermal sensor with beam without thermocouple |
| abstract |
An infrared thermal sensor for sensing infrared radiation is disclosed. The infrared thermal sensor comprises a substrate and a cap structure together forming a sealed cavity, a membrane arranged in said cavity for receiving infrared radiation (IR) through a window or aperture and a plurality of beams for suspending the membrane. At least one beam has a thermocouple arranged therein or thereon for measuring a temperature difference (ΔT) between the membrane and the substrate, the plurality of beams. Furthermore at least one beam is mechanically supporting the membrane without a thermocouple being present therein or thereon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10168223-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9989409-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11204297-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016169738-A1 |
| priorityDate |
2013-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |