| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8411
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-1222 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-0425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-55 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 |
| filingDate |
2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d6af8a2b201683ed579b2eb08681dc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6964512ad2a9f7fcec5855a39dacb390 |
| publicationDate |
2016-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016320293-A1 |
| titleOfInvention |
Apparatus with a spectral reflectometer for processing substrates |
| abstract |
A spectral reflectometer system for measuring a substrate is provided. A light source is provided. At least one optical detector is provided. An optical cable comprises a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to an optical path, and a second plurality of optical fibers, which are reflection optical fibers which extend from the optical path to the at least one optical detector. A microlens array is in the optical path. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022205840-A1 |
| priorityDate |
2015-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |