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publicationDate 2016-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2016318768-A1
titleOfInvention Process for preparing octachlorotrisilane and higher polychlorosilanes with utilization of hexachlorodisilane
abstract A controlled preparation of octachlorotrisilane and higher polychlorosilane such as DCTS and DCPS from monomeric chlorosilane, proceeds by exposing the chlorosilane to a nonthermal plasma and recycling chlorosilane that has not been converted to octachlorotrisilane into the plasma.
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