| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75b86e50a7529f6158517db14a0b81df |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B2201-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4494
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4444
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00 |
| filingDate |
2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26a2cf1f9d99b92b0a6836bd7bae05b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7e66cad3bb8e3964f9d553c4d1acf60 |
| publicationDate |
2016-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016310992-A1 |
| titleOfInvention |
Monolithically integrated three electrode cmut device |
| abstract |
A capacitive micromachined ultrasonic transducer (CMUT) cell comprising three electrodes: a first electrode coupled to a cell membrane; a second electrode embedded into a cell floor opposing the first electrode and separated therefrom by a gas or vacuum cavity; and a third electrode opposing the second electrode on the cavity side, wherein a dielectric layer is sandwiched between the second electrode and the third electrode to create a capacitive relation between the second electrode and the third electrode. The three electrode CMUT cell provides an ultrasound transducer with two actively driven (controlled) electrodes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10725597-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7346541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020026373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9950342-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10272471-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017269039-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11618056-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11331693-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I703490-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021321981-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017157646-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11097312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11458504-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015016227-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018095937-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9987661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3597313-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020016323-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11084062-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10265728-B2 |
| priorityDate |
2013-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |