http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016298223-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec3c49aec16d9785d5fa11481fcfdeeb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B7-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-11 |
| filingDate | 2014-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a26ff9eae20d72d34a8d2545aa3afcac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_635f5a1d41d542bfe2bd146483fe0bb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a679bc5ad30739c2a54ad04ae36e2433 |
| publicationDate | 2016-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2016298223-A1 |
| titleOfInvention | Method for producing internal member of dry etching chamber |
| abstract | A method for producing an internal member of a dry etching chamber by forming an yttria coating on the member. With H 2 gas and Ar gas used as working gases, Ar gas and H 2 gas are supplied to a plasma spray apparatus so the flow-volume ratio of Ar gas to H 2 gas is 6 to 8 with a flow rate of Ar gas set to 60 to 75 liters/min to increase the flow rate of Ar gas with respect to a flow rate of H 2 gas, so that the speed of a plasma jet is increased and the temperature of the plasma jet is decreased, then yttria fine powder having a particle size of 10 to 20 μm is introduced as a powder material to the plasma jet, and the plasma jet containing molten yttria fine powder is sprayed onto the surface of the member. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023113811-A1 |
| priorityDate | 2013-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.