| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-346 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-76 |
| filingDate |
2014-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b8053061b6c3e2b864aef05d34975d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae3bae5e7ef3263729d1a4195c50fd34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9213a9ad4bc07a795fdd9abebcc121f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_264a6f8522d3cb2b81fc7337528a3dd7 |
| publicationDate |
2016-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016276179-A1 |
| titleOfInvention |
Nitrogen oxide abatement in semiconductor fabrication |
| abstract |
Embodiments enclosed herein relate to methods and apparatus for reducing nitrogen oxides (NO x ) produced during processing, such as during semiconductor fabrication processing. A processing system may include an abatement controller and an effluent abatement system, wherein the abatement controller controls the effluent abatement system to reduce NO x production, while ensuring abatement of the effluent gases from the processing system. The effluent abatement system may include a combustion-type effluent abatement system and/or a plasma-type effluent abatement system. The abatement controller may select operating modes of the effluent abatement systems to reduce NO x production. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11306971-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107670481-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11221182-B2 |
| priorityDate |
2014-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |