| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-1201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2227-323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-35 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| filingDate |
2016-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ceb22811d0d9a50e9d953b28ee6f1457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbeb78d178f139257d95c7f17299d1ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51f1e9f60db10576547691078b4d37a2 |
| publicationDate |
2016-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016260902-A1 |
| titleOfInvention |
Vapor deposition device, vapor deposition method, and method for producing organic electroluminescence display device |
| abstract |
A vapor deposition device ( 50 ) disclosed, a partition wall ( 26 ) standing between film formation regions on a film formation substrate ( 200 ), includes: a mask unit ( 80 ) including a shadow mask ( 81 ) and a vapor deposition source ( 85 ) fixed in position relative to each other; contacting means for bringing the film formation substrate ( 200 ) and the shadow mask ( 81 ) into contact with each other at the partition wall ( 26 ); and moving means for moving at least a first one of the mask unit ( 80 ) and the film formation substrate ( 200 ) relative to a second one thereof in a state in which the contact caused by the contacting means is kept. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021166922-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056277-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10629853-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020139626-A1 |
| priorityDate |
2010-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |