| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J133-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J183-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D19-0409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J183-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J133-08 |
| filingDate |
2016-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0859f3251843cdbeafd0c543455e4551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e9fd23ba9dfbba2d6356348102fddf5 |
| publicationDate |
2016-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016230056-A1 |
| titleOfInvention |
Agglutinant for pellicle and a pellicle using it |
| abstract |
A pellicle is proposed in which the agglutinant layer which enables the pellicle to adhere to a photomask is doped with a de-foaming agent which depends on a reactive fluorine-modified silicone oil for its anti-foaming performance, and typically such reactive fluorine-modified silicone oil has a vinyl group at both ends of its molecular chain. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114561172-A |
| priorityDate |
2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |