| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1e3d8364bf64e4ac6e1a9cd5df2bd54 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 |
| filingDate |
2016-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_078bca2b5c9ac458d9d031b67b890e9d |
| publicationDate |
2016-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016197017-A1 |
| titleOfInvention |
Finfet device and fabrication method thereof |
| abstract |
A method for forming a FinFET device is provided. The method includes providing a substrate having a first region and a second region; and forming a plurality of fins on the substrate. The method also includes forming a plurality of doping regions with different doping concentrations in the fins in the first region; and forming a plurality of dummy gate structures over the plurality of fins. Further, the method includes forming source and drain regions in the plurality of fins at both sides of the dummy gate structures; and removing the dummy gate structures to form a plurality of openings to expose the plurality of fins. Further, the method also includes forming a plurality of work function layers with different work functions on the exposed fins in the openings in the second region; and forming gate structures in the openings. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I646685-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10991691-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019252518-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11121040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580883-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018063359-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108511441-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110581102-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11316031-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10354997-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021264090-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10515957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108511441-A |
| priorityDate |
2015-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |