Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6af9a57049d2d91c036d4f5ab49154cb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B61-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L43-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L43-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L43-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-80 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate |
2015-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b3a535763470459f7442d9a7d148534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba8c8291d4ed64d4fb864833571efc2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd6033dcb00c474837af4975c39c7f0c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01583f14d9e41e8828423d07377be936 |
publicationDate |
2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2016190207-A1 |
titleOfInvention |
Integrated circuits including magnetic tunnel junctions for magnetoresistive random-access memory and methods for fabricating the same |
abstract |
Integrated circuits that include a magnetic tunnel junction (MTJ) for a magnetoresistive random-access memory (MRAM) and methods for fabricating such integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a lower electrode on a metal interconnect. The metal interconnect is disposed above a semiconductor substrate and is aligned with a normal axis that is substantially perpendicular to the semiconductor substrate. The lower electrode includes a conductive metal plug. A MTJ stack is formed on the lower electrode aligned with the normal axis. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113571465-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021184109-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276636-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021202830-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190049180-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11665972-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017141159-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109755269-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112599557-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102403731-B1 |
priorityDate |
2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |