| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-112
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 |
| filingDate |
2014-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32f6a67b1b38dc1f49b1b260fd966c31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f08b0ee57da2fc8885f52c176617990e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e5c9c8e4d850f768468ca2d4ce447e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88689fc225b665f1596b5aeb3391bf8a |
| publicationDate |
2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016185592-A1 |
| titleOfInvention |
Method of Selectively Removing an Anti-Stiction Layer on a Eutectic Bonding Area |
| abstract |
A microelectromechanical systems (MEMS) package includes a eutectic bonding structure free of a native oxide layer and an anti-stiction layer, while also including a MEMS device having a top surface and sidewalls lined with the anti-stiction layer. The MEMS device is arranged within a MEMS substrate having a first eutectic bonding substructure arranged thereon. A cap substrate having a second eutectic bonding substructure arranged thereon is eutectically bonded to the MEMS substrate with a eutectic bond at the interface of the first and second eutectic bonding substructures. The anti-stiction layer lines a top surface and sidewalls of the MEMS device, but not the first and second eutectic bonding substructures. A method for manufacturing the MEMS package and a process system for selective plasma treatment are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11279615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108622849-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021024348-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11167979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023121367-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11040870-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11220423-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10239746-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10882735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109775652-A |
| priorityDate |
2014-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |