| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-0663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-163
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0645 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-48721 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-00 |
| filingDate |
2014-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c6fc39f7b3d034c658a7296b447f8bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65ce0bc4cbe701501a57bcce43616b1b |
| publicationDate |
2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016184819-A1 |
| titleOfInvention |
Self-aligned nanogap fabrication |
| abstract |
Disclosed herein is a method comprising: depositing a second electrode of each of a plurality of electrode pairs onto a substrate, through an opening of one or more resist layers; depositing a strip of a sacrificial layer directly on the second electrode through the same opening of the one or more resist layer; depositing a first electrode of each of the plurality of electrode pairs directly on the strip of the sacrificial layer through the same opening of the one or more resist layer; and forming a nanogap channel by removing the strip of the sacrificial layer; wherein the strip of the sacrificial layer is sandwiched between and in direct contact with the first electrode and the second electrode before the strip is removed, and wherein at least a portion of the first electrode directly faces at least a portion of the second electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11320417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11740226-B2 |
| priorityDate |
2014-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |