| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2014-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3f5dc18033d87430391349b43ead17a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f9dc20438d1a98a1aa2cca0de9d18d1 |
| publicationDate |
2016-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016181108-A1 |
| titleOfInvention |
Doping of High-K Dielectric Oxide by Wet Chemical Treatment |
| abstract |
A method for fabricating a semiconductor device includes forming a first high-k (HK) dielectric layer over a substrate, performing a wet treatment process to the first HK dielectric layer. The wet treatment includes a dopant. The method also includes performing an annealing process to the first HK dielectric layer such that the dopant diffuses into the first HK dielectric layer to form a modified HK dielectric layer. Therefore the modified HK dielectric layer has a second dielectric constant which is different than the first dielectric constant. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735426-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021384034-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11075283-B2 |
| priorityDate |
2014-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |