| abstract |
The present disclosure relates to a microelectrode for measuring EMG signals of a laboratory microfauna. The present disclosure includes a metal plate with an insulating plate deposited on a surface, a plurality of silicon substrates disposed on the insulating plate, the silicon substrates being electrically connected to the metal plate, covered with an insulator, and adjacent to one another, and a plurality of needle electrodes, each formed on the respective silicon substrates as an integral part thereof, wherein the needle electrodes have the same predetermined length, have a tapered shape from the respective silicon substrates, are spaced apart from each other by a predetermined distance, and wherein a metallic layer is formed on each of the needle electrodes by depositing metal materials, the insulator is formed on the metallic layer, and a portion of the metallic layer at a tip is exposed. |