| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| filingDate |
2016-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbeb78d178f139257d95c7f17299d1ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ceb22811d0d9a50e9d953b28ee6f1457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc184310b634ae04f445c094155c1dbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51f1e9f60db10576547691078b4d37a2 |
| publicationDate |
2016-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016149135-A1 |
| titleOfInvention |
Vapor deposition particle projection device and vapor deposition device |
| abstract |
The vapor deposition particle injecting device ( 20 ) includes a crucible ( 22 ), a holder ( 21 ) having at least one injection hole ( 21 a ), and plate members ( 23 through 25 ) provided in the holder ( 21 ). The plate members ( 23 through 25 ) have respective openings ( 23 a through 25 a ) corresponding to the injection hole ( 21 a ), and the plate members ( 23 through 25 ) are arranged away from each other in a direction perpendicular to the opening planes of the openings. The injection hole ( 21 a ) and the openings ( 23 a through 25 a ) overlap each other in the plan view. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021292890-A1 |
| priorityDate |
2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |