| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2105-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2033-08 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-00 |
| filingDate |
2014-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a7a9d9871bebe361c8169a93d3d6c5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6b97476a86d82284bc98196a5a7c926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acbaa9ef4178ed8091e70d5ad11c6602
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_198e601c60c434db2e9d3b90cc6d0385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b61088e9746ab23c14c7d85f5c10873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e43155ccb75510c0ed608eddf753b2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3c50823e7caf650900a2c8c7beaf384 |
| publicationDate |
2016-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016147143-A1 |
| titleOfInvention |
Imprint method and apparatus |
| abstract |
An imprint method includes: placing a light-curable composition on a workpiece substrate (placement); bringing the light-curable composition and a mold into contact with each other an atmosphere of a condensable gas (contact); aligning the mold and the workpiece substrate (alignment); irradiating the light-curable composition with light to obtain a light-cured composition (irradiation); and separating the light-cured composition and the mold from each other after the irradiation (release). The film thickness of the light-curable composition during the alignment is 20% or more greater than that of the light-cured composition after the release. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015158240-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10562223-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10124529-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11194247-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10481490-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020307038-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017129144-A1 |
| priorityDate |
2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |