abstract |
A method for treating surface of releasing chamber in contact with test object comprising the following steps: (1) with regard to components made by processing stainless steel or glass, if the component is stainless steel, the stainless steel component is oxidized with an acid and then washed with an organic solvent and water, or electrolyzed after oxidation and then washed with an organic solvent and water; if the component is glass, the glass component is corroded by HCL or HF, or the surface thereof is roughened by a physical method; and (2) then follows production of a deactivated layer by processing the surface of the component washed in step (1), or first production of an intermediate layer by processing the surface of the component washed in step (1), and then production of a deactivated layer by processing the surface of the intermediate layer. |