http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016076167-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00 |
| filingDate | 2015-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f89b5b354e16541309900553819cf81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca31e4d820429600cd27758b744606e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8bb6dc17fa94ab133f3d433e2d11e59 |
| publicationDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2016076167-A1 |
| titleOfInvention | Rinsing and drying for electrochemical processing |
| abstract | An electroplating/etch apparatus including a fluid jet and a dryer present over the tank containing the electrolyte for the electroplating/etch process. The fluid jet and the dryer remove excess liquids, such as electrolyte, from the component being plated or etched, e.g., working electrode. The working electrode is present on a holder that traverses from a first position within the tank during a plating or etch operation to a second position that is outside the containing the plating electrolyte. The fluid jet rinses the working electrode when the holder is in the second position, and the forced air dryer blows any remaining fluid from the fluid jet and the electrolyte from the working electrode into the tank. |
| priorityDate | 2010-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 85.