patent/US-2016066099-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016066099-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2410-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R23-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0078
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R7-08
filingDate	2015-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bffd5ead7be2632cc33920cf32a6287e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f1125e01b613a26787a9854500b0a30
publicationDate	2016-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2016066099-A1
titleOfInvention	MEMS Microphone with Low Pressure Region between Diaphragm and Counter Electrode
abstract	A MEMS microphone includes a first diaphragm element, a counter electrode element, and a low pressure region between the first diaphragm element and the counter electrode element. The low pressure region has a pressure less than an ambient pressure.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I658986-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109525928-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021176569-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018091906-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11617042-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112970272-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10362408-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020072904-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017230757-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10589990-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018226731-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112020007733-T5 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3635974-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111957544-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020106637-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019084827-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3518558-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10555090-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2554470-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10477322-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11516597-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11743658-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019226958-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10939214-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11272296-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11787688-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10591326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10315912-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11671766-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107872760-A
priorityDate	2013-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522826 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID683

Total number of triples: 59.