http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016041469-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2035 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2015-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a76e8605131abd5f02bb0e161a1e6b55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dfacefa2811098bef134c5a01af3f40 |
| publicationDate | 2016-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2016041469-A1 |
| titleOfInvention | Method for patterning photosensitive resin layer |
| abstract | A method for patterning a photosensitive resin layer includes a forming process of forming, on a first photosensitive resin layer containing a first resin, a second photosensitive resin layer containing a second resin different from the first resin and a solvent and a patterning process of patterning the first photosensitive resin layer and the second photosensitive resin layer by simultaneously exposing and developing the first photosensitive resin layer and the second photosensitive resin layer, in which the second photosensitive resin layer is a water-repellent layer and the second resin has higher solubility in the solvent than the solubility of the first resin. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3447578-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10599034-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109422236-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111919283-A |
| priorityDate | 2014-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 90.