http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016041467-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
filingDate 2015-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d529f34bbf654f25487b67ec5e47938
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8988942cd30373bb10a8671eb7c2316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a3859d42c5414565a3144351d52a7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af768ef7f4654236b60fb18d88e31534
publicationDate 2016-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2016041467-A1
titleOfInvention Photolithographic methods
abstract Provided are photoresist overcoat compositions, substrates coated with the overcoat compositions and methods of forming electronic devices by a negative tone development process. The compositions, coated substrates and methods find particular applicability in the manufacture of semiconductor devices.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11281103-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10114292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10852637-B2
priorityDate 2011-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11515
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421063912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415736378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394539
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3494509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15333521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8165
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539241
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67322
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538106
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474318
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416003519
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409500530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31289
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420747443
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID89801805
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15901
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62347
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22481847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414868281
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15458
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID545378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426079441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538684
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8908
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414885245
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638097
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420299240
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416052602
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88454
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419707315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409010033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513864
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19163
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20498
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31246
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID643455
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11175590
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559397
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416161498
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9641
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420462446
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426127296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13187
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456499112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430854851
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410489073
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421170388
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416003769
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421655474
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11001803
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578938
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7352
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20083
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID162890
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID643502
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425986512
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8093
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11583
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67831
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21894205
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421312496
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7865
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420453144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419528183
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID545824
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421295590
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573701
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135495951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2774972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414880537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11614
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62430
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11814213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419511092
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415831639
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420317239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8738
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8034
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10885
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61233779
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID162890
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872467
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420171292
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431247791
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415730548
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414878861
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407219005
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415738202
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11124
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12348
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413861362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408510678
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420167136
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420348536
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526596
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454413993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419707310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524931
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420257518
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22597223
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID454
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410490365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9608
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62308
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9864
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558969
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427718586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539361
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3820533
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522744
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2736748
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510529
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414865767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424955067
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID402
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559526
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420462479
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414882160
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13981380
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415730383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11448
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420256063
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123334
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136181
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452875120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414887309
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421145262
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420927840
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16670
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416011437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484822
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419706947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7621
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415759619
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449385151
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11024549
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571676
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872598
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521664
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755888
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7678
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87087495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11519
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12703
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76352
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID561663
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6999002
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12217
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419602172
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92821
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410550496
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426005046
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7958
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7064
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11269
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559499

Total number of triples: 241.