| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2307-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2400-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0176
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2499-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 |
| filingDate |
2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_811281fadad8713ea77f0b687b80c888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e63c99530cb1d41c58f65da05eb95662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25b708109e099d7c0bb35fa4a6abf39a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09262c80ce31be4f024bd90f77a61461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37537280a584e55050f231c891f70970
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb19760df5344dccb3c1a81021f098b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26358de4a7e0e3555e522afe5e3bb33e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75c561616c05fb68727a42cf9c216b7e |
| publicationDate |
2016-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016031701-A1 |
| titleOfInvention |
Micromechanical Structure and Method for Fabricating the Same |
| abstract |
A micromechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure has a functional region configured to deflect with respect to the substrate responsive to a force acting on the functional region. The functional structure includes a conductive base layer and a functional structure comprising a stiffening structure having a stiffening structure material arranged at the conductive base layer and only partially covering the conductive base layer at the functional region. The stiffening structure material includes a silicon material and at least a carbon material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017326589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10864551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10611630-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10710874-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017142154-A |
| priorityDate |
2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |