| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00293 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate |
2014-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e5c9c8e4d850f768468ca2d4ce447e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_952155f0aee3b5e96e4717f93a91d221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c08a07342de648015d3717dff4b6a467
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81505d111f284d27d20f100005eeedff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88689fc225b665f1596b5aeb3391bf8a |
| publicationDate |
2016-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2016016789-A1 |
| titleOfInvention |
Thin film structure for hermetic sealing |
| abstract |
The present disclosure relates to a MEMS device with a hermetic sealing structure, and an associated method. In some embodiments, a first die and a second die are bonded at a bond interface region to form a chamber. A conformal thin film structure is disposed covering an outer sidewall of the bond interface region to provide hermetic sealing. In some embodiments, the conformal thin film structure is a continuous thin layer covering an outer surface of the second die and a top surface of the first die. In some other embodiments, the conformal thin film structure comprises several discrete thin film patches disposed longitudinal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021126563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019153130-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11299393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11174157-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018106193-A1 |
| priorityDate |
2014-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |