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publicationDate 2016-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2016005913-A1
titleOfInvention Semiconductor photomultiplier and a process of manufacturing a photomultiplier microcell
abstract The present disclosure relates to a process of manufacturing a photomultiplier microcell. The process comprises providing an insulating layer over an active region; and implanting a dopant through the insulating layer to form a photosensitive diode in the active region. The insulating layer once formed is retained over the active region throughout the manufacturing process.
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