| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_379bc5163b5aa634ddc5e7fcb302b871 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2008 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2015-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b83d1916e08ee7fd8cb6e02c1bfda510
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca17192b843daf8d29d9ddf37166ddfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a43f40441ddc53ba60fa282c65bf2fd3 |
| publicationDate |
2015-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015377958-A1 |
| titleOfInvention |
Apparatus and method for nanoprobing of electronic devices |
| abstract |
A method for probing a semiconductor device under test (DUT) using a combination of scanning electron microscope (SEM) and nanoprobes, by: obtaining an SEM image of a region of interest (ROI) in the DUT; obtaining a CAD design image of the ROI; registering the CAD design image with the SEM image to identify contact targets; obtaining a Netlist corresponding to the contact targets and using the Netlist to determine which of the contact targets should be selected as test target; and, navigating nanoprobes to land a nanoprobe on each of the test targets and form electrical contact between the nanoprobe and the respective test target. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021278771-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9958501-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10175295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10768211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10056304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11762302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9891280-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10539589-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113506757-A |
| priorityDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |