| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2cddea32cd32f4dd765eb71d20347f8f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-54373 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 |
| filingDate |
2015-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb6473e09e35e3b503f67b39731ac4a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc46f76ed12ab8709b6428b7859bf0cb |
| publicationDate |
2015-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015377834-A1 |
| titleOfInvention |
Thin film bulk acoustic resonator with signal enhancement |
| abstract |
Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018003677-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10539537-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022349858-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020010293-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017370866-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10466194-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11408855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11545956-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101783-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3818371-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018149646-A1 |
| priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |