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publicationDate 2015-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015338258-A1
titleOfInvention Flow Sensor and Manufacturing Method for the Same
abstract When an exposed part of a semiconductor chip is reduced in size, a tendency of development of a crack on the semiconductor chip is suppressed. A pressure of injection of a resin MR into a second space creates a gap on a contact part SEL where an elastic film LAF and a semiconductor chip CHP 1 are in contact, and a resin MR 2 different in constituent from the resin MR infiltrates into the gap. As a result, in an area of semiconductor chip CHP 1 that is exposed from the resin MR, the resin MR 2 is formed in an area other than a flow detecting unit FDU and an area around it. Hence, an area of semiconductor chip CHP 1 that is exposed from the resins MR and MR 2 can be reduced in size.
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