| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2015-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d223ae60d4f6ba8f9905b823a1efdf0 |
| publicationDate |
2015-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015332944-A1 |
| titleOfInvention |
Carrier substrate and method for fixing a substrate structure |
| abstract |
A carrier substrate for supporting a substrate structure having a process substrate and a frame structure has a base portion and a support portion. The support portion is arranged on the base portion. The support portion and the base portion form a recess region for receiving the frame structure of the substrate structure. The support portion has a support surface area for supporting the process substrate of the substrate structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016064267-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10978334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11348810-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020123909-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11720034-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019318942-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11205978-B2 |
| priorityDate |
2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |