| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32899
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2015-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7e2dc491c73de0f8d3118fcbc1b93c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04be56a9d142d17374c31321a508079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78e08906f4cf6a1a02c756f43948f2c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23b76f11eb5d512ca88962d4037a1290
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebd13a0a3fb6994c7c8e5822d2351c62 |
| publicationDate |
2015-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015325411-A1 |
| titleOfInvention |
Directional treatment for multi-dimensional device processing |
| abstract |
Embodiments of the disclosure include apparatus and methods for modifying a surface of a substrate using a surface modification process. The process of modifying a surface of a substrate generally includes the alteration of a physical or chemical property and/or redistribution of a portion of an exposed material on the surface of the substrate by use of one or more energetic particle beams while the substrate is disposed within a particle beam modification apparatus. Embodiments of the disclosure also provide a surface modification process that includes one or more pre-modification processing steps and/or one or more post-modification processing steps that are all performed within one processing system. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10964546-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9840778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109328392-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013319612-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10629752-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11429026-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9911596-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10923371-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10504703-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019157093-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I722204-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10141161-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020258780-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015255243-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11608558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018076007-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10787742-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7330361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018187310-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11189635-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9355922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016351390-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587796-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9966240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11024746-B2 |
| priorityDate |
2014-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |