| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-835 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2013-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9543c8b6684c2270cb0549269bc011e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d44172ce746e60e52eabce005a71c0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6edc537b05b40a8792dcf0554ff5ed4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e82d19c7fe263e92df99113f575926b |
| publicationDate |
2015-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015323871-A1 |
| titleOfInvention |
Use of compositions comprising a surfactant and a hydrophobizer for avoiding anti pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below |
| abstract |
In a method of treating a substrate including patterns having line-space dimensions of 50 nm or below, the substrate is rinsed by an aqueous composition including at least one non-ionic surfactant A and at least one hydrophobizer B. The at least one surfactant A has an equilibrium surface tension of 10 mN/m to 35 mN/m, determined from a solution of the at least one surfactant A in water at the critical micelle concentration. The hydrophobizer B is selected so that the contact angle of water to the substrate is increased by contacting the substrate with a solution of the hydrophobizer B in water by 5-95° compared to the contact angle of water to the substrate before such contacting. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11373860-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10403491-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017365486-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022262622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10538724-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094527-B2 |
| priorityDate |
2012-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |