| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 |
| filingDate |
2015-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf7bbfe233cc4041ccbdfe693fb6f530
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d5700a19ec2379eb50f813bc886606b |
| publicationDate |
2015-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015323429-A1 |
| titleOfInvention |
Method for creating s/tem sample and sample structure |
| abstract |
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. A novel sample structure and a novel use of a milling pattern allow the creation of S/TEM samples as thin as 50 nm without significant bowing or warping. Preferred embodiments of the present invention provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10204762-B2 |
| priorityDate |
2006-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |