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filingDate 2015-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015318343-A1
titleOfInvention Insulator, capacitor with the same and fabrication method thereof, and method for fabricating semiconductor device
abstract Disclosed is a multilayer insulator, a metal-insulator-metal (MIM) capacitor with the same, and a fabricating method thereof. The capacitor includes: a first electrode; an insulator disposed on the first electrode, the insulator including: a laminate structure in which an aluminum oxide (Al 2 O 3 ) layer and a hafnium oxide (HfO 2 ) layer are laminated alternately in an iterative manner and a bottom layer and a top layer are formed of the same material; and a second electrode disposed on the insulator.
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priorityDate 2008-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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