| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
2014-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f01682eeaecc5bac09a769243d6aba2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_241d475c177271a18f8282efd70696fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ba5813d192c81e50756d438b82a3449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ee0bbb2d8b53546304dcb82f754e429
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bffd1edcf314eab2d0adf27fd600dc66 |
| publicationDate |
2015-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015318184-A1 |
| titleOfInvention |
Directional chemical oxide etch technique |
| abstract |
A method of forming a trench in an oxide layer; where the oxide layer is formed on top of a nitride layer. The trench is formed using an iterative etching technique until the nitride layer is exposed, each iterative etching step includes; using an isotropic etching technique to remove a portion of the oxide layer, the isotropic etching technique produces a byproduct that remains along a sidewall and a bottom of the trench, then using an anisotropic etching technique to remove the salt from the bottom of the trench, leaving salt on the sidewalls of the trench. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018261510-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10453751-B2 |
| priorityDate |
2014-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |