| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a911d04aed3ce17150d01a5c90a09db |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68381 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7806 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 |
| filingDate |
2015-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_452f2533e8b4ff67e2c252f1c675c505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10c0fe22e2fb354811feaad247a18029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d589bbacd46aa8c3025488a47ced095e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_feec09c0b4ef055a72a01d21295563ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7829e4533979ae74f34ffda21fa93f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac0e561e3f04e0bc25f704c2867ef014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9997e9c090a11db09eec3e721fc29eb |
| publicationDate |
2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015279741-A1 |
| titleOfInvention |
Epitaxial lift off stack having a pre-curved handle and methods thereof |
| abstract |
Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a flattened, pre-curved support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process includes bending the pre-curved support handle to have substantial curvature while peeling the epitaxial material from the substrate and forming an etch crevice therebetween. Compression is maintained within the epitaxial material during the etching process. The flattened, pre-curved support handle may be formed by flattening a pre-curved support material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019180165-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437531-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022047170-A1 |
| priorityDate |
2008-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |