http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015276638-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a88e018b4d1ee8e6e64d29a3ac06452a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c74df98745a603c8c09037e683022829 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41F33-0081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41F13-025 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-04 |
| filingDate | 2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a129c39f0a8285d361eec3eff6dc0bc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d197a6c3ab248af43281ca648f1d4cc |
| publicationDate | 2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2015276638-A1 |
| titleOfInvention | Method for forming aligned patterns on a substrate |
| abstract | A method for forming a second pattern in registration with a first pattern on a substrate is disclosed. The method comprises providing the substrate having a first magnitude of an associated electrical characteristic and at least one alignment structure that is associated with a second magnitude of the electrical characteristic different from the first magnitude. A controller is used to control an electrical probe to measure the electrical characteristic at a plurality of positions proximate the substrate. The measured electrical characteristic corresponds to the alignment structure when the probe is proximate to the alignment structure and to the substrate when the probe is not proximate to the alignment structure. The measured electrical characteristics are used to identify a location of the alignment structure. The second pattern is formed so that it is in registration with the first pattern, based on the identified location of the alignment structure. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10723114-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114171500-A |
| priorityDate | 2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4421864 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226419973 |
Total number of triples: 22.